Scientists detail new semiconductor process

This method could pave the way for silicon

Researchers have developed a new semiconductor process using nanosponges, which are essentially porous structures that have tiny holes, according to Nanowerk News.

Although there have been experiments conducted in this area before, this research could pave the way for small sensors and optical and electrical components.

The scientists, based at TU Wien, have discovered a new method to manufacture porous silicon carbide in a controlled setting. They said it offers a range of benefits.

Firstly, silicon carbide provides improved chemical resistance, meaning it can be used in biological applications. Existing silicon methods need extra coating.

Markus Leitgeb, who works for the Institute of Sensor and Actuator Systems at TU Wien, developed the material with the support of Professor Ulrich Schmid, CTR Carinthian Tech Research AG and the Competence Centers for Excellent Technologies (COMET) programme.

In his experiment, he used a mirror capable of reflecting shades of light along with an SiC wafer. He did this by generating layers of an estimated 70 nm each.

"There is a whole range of exciting technical possibilities available to us when making a porous structure with countless nano holes from a solid piece of a semiconductor material," he said

"The porous structure influences the manner in which light waves are affected by the material. If we can control the porosity, this means we also have control over the optical refractive index of the material."

Leitgeb's findings could transform sensor technology. With porous semiconductor sensors, technologists now have a way to measure the refractive index of smaller amounts of liquid.

Another groundbreaking result is that scientists can make SiC wafers porous in a localised way. They can tap into the material to generate new SiC layers in these areas, a technique that can generate microstructures and nanostructures.

Professor Schmid added: "Until now, silicon has been used for this purpose, a material with which we already have a lot of experience."